Tailoring Stresses in Piezoresistive Microcantilevers for Enhanced Surface Stress Sensing: Insights from Topology Optimization

TL;DR

This paper uses topology optimization to design microcantilevers with significantly improved sensitivity for surface stress sensing, revealing new configurations that outperform traditional designs.

Contribution

It introduces topology optimization for microcantilever design, achieving up to 30% sensitivity enhancement and identifying novel double-cantilever configurations.

Findings

Optimized designs show up to 30% increased sensitivity.

Double-cantilever configuration improves stress distribution.

Redefines design principles beyond conventional rectangular cantilevers.

Abstract

In assessing piezoresistive microcantilever sensitivity for surface stress sensing, the key is its capacity to translate surface stress into changes in resistance. This change hinges on the interplay between stresses and piezoresistivity. Traditional optimization has been constrained by rudimentary 1D models, overlooking potentially superior designs. Addressing this, we employed topology optimization to optimize Si(100) microcantilevers with a p-type piezoresistor. This led to optimized designs with up to 30% enhanced sensitivity over conventional designs. A recurrent "double-cantilever" configuration emerged, which optimizes longitudinal stress and reduces transverse stress at the piezoresistor, resulting in enhanced sensitivity. We developed a simplified model to analyze stress distributions in these designs. By adjusting geometrical features in this model, we identified ideal parameter combinations for optimal stress distribution. Contrary to conventional designs favoring short cantilevers, our findings redefine efficient surface stress sensing, paving the way for innovative sensor designs beyond the conventional rectangular cantilevers.