Large-area deposition of protective (Ti,Al)N coatings onto polycarbonate
Lena Patterer, Sabrina Kollmann, Teresa de los Arcos, Leonie Jende,, Soheil Karimi Aghda, Damian M. Holzapfel, Sameer Aman Salman, Stanislav, Mr\'az, Guido Grundmeier, Jochen M. Schneider

TL;DR
This study develops a large-area pulsed sputtering process to deposit protective (Ti,Al)N coatings on polycarbonate, overcoming material property differences and ensuring adhesion and low residual stress for potential protective applications.
Contribution
It introduces a systematic method to optimize pulsed sputtering parameters for depositing stress-controlled (Ti,Al)N coatings on polymers, addressing key challenges in coating adhesion and stress management.
Findings
Achieved low residual tensile stress of 2.2 GPa in (Ti,Al)N coatings
Identified interfacial bonds indicating reactions at the PC | coating interface
Demonstrated elastic modulus of 296 GPa for the coating
Abstract
Polycarbonate (PC) and protective (Ti,Al)N coatings exhibit extremely different material properties, specifically crystal structure, thermal stability, elastic and plastic behavior as well as thermal expansion coefficients. These differences present formidable challenges for the deposition process development as low-temperature synthesis routes have to be explored to avoid a thermal overload of the polymer substrate. Here, a large-area sputtering process is developed to address the challenges by systematically adjusting target peak power density and duty cycle. Adhering (Ti,Al)N coatings with a critical residual tensile stress of 2.2 +/- 0.2 GPa are obtained in the pulsed direct current magnetron sputtering range, whereas depositions at higher target peak power densities, realized by high power pulsed magnetron sputtering, lead to stress-induced adhesive and/or cohesive failure. The…
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Taxonomy
TopicsMetal and Thin Film Mechanics · Semiconductor materials and devices · Diamond and Carbon-based Materials Research
