DeepFocus: Fast focus and astigmatism correction for electron microscopy
Philipp Johannes Schubert, Rangoli Saxena, Joergen Kornfeld

TL;DR
DeepFocus is a data-driven approach that rapidly and reliably corrects focus and astigmatism in electron microscopy, even under low signal conditions, outperforming traditional methods in speed and adaptability.
Contribution
DeepFocus introduces a novel data-driven method for aberration correction that is fast, robust, and easily adaptable across different microscopes and challenging samples.
Findings
Reduces processing time by over tenfold compared to existing methods.
Works effectively under very low signal-to-noise ratios.
Rapidly converges over a large range of aberrations.
Abstract
High-throughput 2D and 3D scanning electron microscopy, which relies on automation and dependable control algorithms, requires high image quality with minimal human intervention. Classical focus and astigmatism correction algorithms attempt to explicitly model image formation and subsequently aberration correction. Such models often require parameter adjustments by experts when deployed to new microscopes, challenging samples, or imaging conditions to prevent unstable convergence, making them hard to use in practice or unreliable. Here, we introduce DeepFocus, a purely data-driven method for aberration correction in scanning electron microscopy. DeepFocus works under very low signal-to-noise ratio conditions, reduces processing times by more than an order of magnitude compared to the state-of-the-art method, rapidly converges within a large aberration range, and is easily recalibrated…
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Taxonomy
TopicsAdvanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques
