High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector

TL;DR

This paper demonstrates high-speed, wide-field nanoscale EUV ptychographic imaging using a table-top source and sCMOS detector, significantly reducing scan times and enabling fast wavefront characterization.

Contribution

It introduces a novel combination of a high-order harmonic EUV source with an sCMOS detector for rapid, high-resolution ptychography and wavefront analysis at 13.5 nm.

Findings

Scan time reduced by up to five times

Wide-field imaging with 100 μm x 100 μm field of view

Imaging speed of 4.6 Megapixels per hour

Abstract

We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. By employing a scientific complementary metal oxide semiconductor (sCMOS) detector the scan time for sub-20 nm high-resolution measurements were significantly reduced by up to a factor of five. The fast frame rate of sCMOS enables wide-field imaging with a field of view of 100 {\mu}m x 100 {\mu}m with an imaging speed of 4.6 Mpix/h. Furthermore, fast EUV wavefront characterization is employed using a combination of the sCMOS detector with orthogonal probe relaxation.