Particle-in-cell modeling of electron beam generated plasma

TL;DR

This paper presents a 2D3V particle-in-cell model for electron beam-generated plasma in argon, analyzing how magnetic fields influence plasma confinement, electron temperature, and transport properties relevant for atomic-precision plasma processing.

Contribution

It introduces a detailed PIC simulation of electron beam plasma with magnetic confinement, highlighting effects on plasma density, temperature anisotropy, and transport mechanisms.

Findings

Magnetic field increases plasma confinement and density near production zone.

Electron temperature is anisotropic in the beam region but isotropic away from it.

Magnetic confinement weakens with increasing pressure, causing plasma spreading.

Abstract

Plasmas generated using energetic electron beams are well known for their low electron temperature ($T_{e}$) and plasma potential, which makes them attractive for atomic-precision plasma processing applications such as atomic layer etch and deposition. A 2d3v particle-in-cell (PIC) model for an electron beam-generated plasma in argon confined by a constant applied magnetic field is described in this article. Plasma production primarily occurs in the path of the beam electrons in the center of the chamber. The resulting plasma spreads out in the chamber through non-ambipolar diffusion with a short-circuit effect allowing unequal electron and ion fluxes to different regions of the bounding conductive chamber walls. The cross-field transport of the electrons (and thus the steady-state characteristics of the plasma) are strongly impacted by the magnetic field. $T_{e}$ is anisotropic in the electron beam region, but low and isotropic away from the plasma production zone. The plasma density increases, and the plasma becomes more confined near the region of production when the magnetic field strengthens. The magnetic field reduces both electron physical and energy transport perpendicular to the magnetic field. $T_{e}$ is uniform along the magnetic field lines and slowly decreases perpendicular to it. Electrons are less energetic in the sheath regions where the sheath electric field repels and confines the low-energy electrons from the bulk plasma. Even though electron and ion densities are similar in the bulk plasma due to quasi-neutrality, electron and ion fluxes on the grounded chamber walls are unequal at most locations. Electron confinement by the magnetic field weakens with increasing pressure, and the plasma spreads out farther from the electron beam region.