Fabrication of Specimens for Atom Probe Tomography Using a Combined Gallium and Neon Focused Ion Beam Milling Approach

TL;DR

This paper introduces a dual-ion focused ion beam method combining gallium and neon ions for preparing atom probe tomography specimens, reducing contamination and improving material analysis accuracy.

Contribution

The novel combined gallium and neon ion beam approach enhances specimen preparation by reducing contamination and increasing precision compared to traditional methods.

Findings

Neon ion beam reduces gallium contamination in specimens.

The method improves analysis of titanium-aluminum alloys.

Enhanced specimen quality for atom probe tomography.

Abstract

We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip-shaping after conventional annulus milling using gallium ions. This dual-ion approach combines the benefits of the faster milling capability of the higher current gallium ion beam with the chemically inert and higher precision milling capability of the noble gas neon ion beam. Using a titanium-aluminum alloy and a layered aluminum/aluminum oxide material as test cases, we show that atom probe tips prepared using the combined gallium and neon ion approach are free from the gallium contamination that typically frustrates composition analysis of these materials due to implantation, diffusion, and embrittlement effects. We propose that by using a focused ion beam from a noble gas species, such as the neon ions demonstrated here, atom probe tomography can be more reliably performed on a larger range of materials than is currently possible using conventional techniques.