From partial data to out-of-sample parameter and observation estimation with Diffusion Maps and Geometric Harmonics
Eleni D. Koronaki, Nikolaos Evangelou, Yorgos M. Psarellis, Andreas G., Boudouvis, Ioannis G. Kevrekidis

TL;DR
This paper introduces a manifold learning framework using Diffusion Maps and Geometric Harmonics to predict missing or out-of-sample data and parameters from partial high-dimensional observations, demonstrated on a chemical vapor deposition process.
Contribution
It develops a novel workflow combining Diffusion Maps and Geometric Harmonics, including a new Double Diffusion Maps approach, for flexible prediction of observations and parameters from partial data.
Findings
Successfully predicts out-of-sample observations and parameters.
Outperforms traditional Gappy-POD in manifold learning tasks.
Framework is adaptable to various application domains.
Abstract
A data-driven framework is presented, that enables the prediction of quantities, either observations or parameters, given sufficient partial data. The framework is illustrated via a computational model of the deposition of Cu in a Chemical Vapor Deposition (CVD) reactor, where the reactor pressure, the deposition temperature and feed mass flow rate are important process parameters that determine the outcome of the process. The sampled observations are high-dimensional vectors containing the outputs of a detailed CFD steady-state model of the process, i.e. the values of velocity, pressure, temperature, and species mass fractions at each point in the discretization. A machine learning workflow is presented, able to predict out-of-sample (a) observations (e.g. mass fraction in the reactor) given process parameters (e.g. inlet temperature); (b) process parameters given observation data; and…
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Taxonomy
TopicsModel Reduction and Neural Networks · Machine Learning and Data Classification · Gaussian Processes and Bayesian Inference
