MEMS for Photonic Integrated Circuits
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed, Sattari, Kristinn B. Gylfason, and Niels Quack
TL;DR
This paper reviews how MEMS technology enhances photonic integrated circuits by enabling tunable components and new functionalities, addressing current limitations and supporting large-scale integration.
Contribution
It provides a comprehensive review of MEMS actuation principles, mechanical tuning mechanisms, and assesses the state-of-the-art MEMS tunable components for PICs.
Findings
MEMS enable wide-range tunability in PICs.
MEMS components are critically assessed for large-scale integration.
MEMS technology offers new design possibilities for photonics.
Abstract
The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
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