A Targeted Sampling Strategy for Compressive Cryo Focused Ion Beam Scanning Electron Microscopy
Daniel Nicholls, Jack Wells, Alex W. Robinson, Amirafshar, Moshtaghpour, Maryna Kobylynska, Roland A. Fleck, Angus I. Kirkland, Nigel D., Browning

TL;DR
This paper introduces a compressive sensing approach with targeted sampling strategies for cryo FIB-SEM, significantly reducing electron dose and increasing imaging speed while preserving image quality for beam-sensitive biological specimens.
Contribution
It presents a novel targeted sampling method using prior reconstructed images and a Bayesian dictionary learning approach to improve cryo FIB-SEM imaging efficiency.
Findings
Electron dose reduced by up to 20 times
Validated effectiveness through simulations on artificial data
Potential to enable damage-free biological imaging
Abstract
Cryo Focused Ion-Beam Scanning Electron Microscopy (cryo FIB-SEM) enables three-dimensional and nanoscale imaging of biological specimens via a slice and view mechanism. The FIB-SEM experiments are, however, limited by a slow (typically, several hours) acquisition process and the high electron doses imposed on the beam sensitive specimen can cause damage. In this work, we present a compressive sensing variant of cryo FIB-SEM capable of reducing the operational electron dose and increasing speed. We propose two Targeted Sampling (TS) strategies that leverage the reconstructed image of the previous sample layer as a prior for designing the next subsampling mask. Our image recovery is based on a blind Bayesian dictionary learning approach, i.e., Beta Process Factor Analysis (BPFA). This method is experimentally viable due to our ultra-fast GPU-based implementation of BPFA. Simulations on…
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Taxonomy
TopicsElectron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
