Fast generation of calculated ADF-EDX scattering cross-sections under channelling conditions
Zezhong Zhang, Ivan Lobato, Annick De Backer, Sandra Van Aert, Peter, Nellist

TL;DR
This paper introduces a rapid, incoherent non-linear method for predicting ADF-EDX scattering cross-sections in mixed atomic columns under channelling conditions, facilitating material analysis at the nanoscale.
Contribution
It extends an atomic lensing model to EDX, enabling fast, accurate predictions of scattering cross-sections for complex heterogeneous materials.
Findings
Predictions agree well with multislice simulations.
The method effectively handles mixed columns in complex nanostructures.
It simplifies quantification of multi-element materials.
Abstract
Advanced materials often consist of multiple elements which are arranged in a complicated structure. Quantitative scanning transmission electron microscopy is useful to determine the composition and thickness of nanostructures at the atomic scale. However, significant difficulties remain to quantify mixed columns by comparing the resulting atomic resolution images and spectroscopy data with multislice simulations where dynamic scattering needs to be taken into account. The combination of the computationally intensive nature of these simulations and the enormous amount of possible mixed column configurations for a given composition indeed severely hamper the quantification process. To overcome these challenges, we here report the development of an incoherent non-linear method for the fast prediction of ADF-EDX scattering cross-sections of mixed columns under channelling conditions. We…
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Taxonomy
TopicsElectron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Electronic and Structural Properties of Oxides
