Quasi-monolithic heterodyne laser interferometer for inertial sensing
Yanqi Zhang, Felipe Guzman
TL;DR
This paper introduces a compact, high-sensitivity heterodyne laser interferometer with a quasi-monolithic design, demonstrating excellent displacement sensitivity suitable for inertial sensing in miniaturized systems.
Contribution
The development of a miniaturized, quasi-monolithic heterodyne interferometer with high environmental noise rejection for inertial sensing applications.
Findings
Displacement sensitivity of 11 pm/rtHz at 100mHz
Size of 20mm x 20mm x 10mm and weight of 4.5 grams
Effective common-mode noise rejection in vacuum tests
Abstract
We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and waveplates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of 11 pm/rtHz at 100mHz, and as low as 0.6pm/rtHz above 1Hz. The prototype unit has a size of 20mm X 20mm X 10mm and weighs 4.5 grams, which allows subsequent integration into compact systems.
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