Asymmetrical contact scaling and measurements in MoS2 FETs
Zhihui Cheng, Jonathan Backman, Huairuo Zhang, Hattan Abuzaid, Guoqing, Li, Yifei Yu, Linyou Cao, Albert V. Davydov, Mathieu Luisier, Curt A., Richter, Aaron D. Franklin

TL;DR
This study investigates contact scaling in MoS2 FETs using asymmetrical contact measurements and simulations, revealing the distinct behaviors of source and drain contacts and the importance of interface quality.
Contribution
It introduces a novel asymmetrical contact measurement method to analyze contact scaling behavior in 2D FETs, providing new insights into charge injection and transfer length.
Findings
Short contact lengths increase variability and reduce drain current.
Transfer length can be as short as 5 nm, depending on interface quality.
Charge injection differs between source and drain contacts.
Abstract
Two-dimensional (2D) materials have great potential for use in future electronics due to their atomically thin nature which withstands short channel effects and thus enables better scalability. Device scaling is the process of reducing all device dimensions to achieve higher device density in a certain chip area. For 2D materials-based transistors, both the channel and contact scalability must be investigated. The channel scalability of 2D materials has been thoroughly investigated, confirming their resilience to short-channel effects. However, systematic studies on contact scalability remain rare and the current understanding of contact scaling in 2D FET is inconsistent and oversimplified. Here we combine physically scaled contacts and asymmetrical contact measurements to investigate the contact scaling behavior in 2D field-effect transistors (FETs). The asymmetrical contact…
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Taxonomy
TopicsGraphene research and applications · Advancements in Semiconductor Devices and Circuit Design · Ferroelectric and Negative Capacitance Devices
