Three Dimensional Imaging using Coherent X-Rays at Grazing Incidence Geometry

TL;DR

This paper introduces a novel 3D CDI algorithm for GISAXS that uses DWBA to accurately interpret diffraction patterns affected by substrate reflections, with successful simulations demonstrating its potential.

Contribution

The paper presents a new 3D CDI algorithm based on DWBA for GISAXS, improving phase retrieval in grazing incidence geometries.

Findings

Algorithm successfully interprets simulated GISAXS diffraction patterns.

DWBA-based approach accounts for substrate reflections.

Verification with real experiments is forthcoming.

Abstract

We have developed a 3 dimensional Coherent Diffraction Imaging (CDI) algorithm to retrieve phases of diffraction patterns of samples in Grazing Incidence Small Angle X-ray Scattering (GISAXS) experiments. The algorithm interprets the diffraction patterns using the Distorted-Wave Born Approximation (DWBA) instead of the Born Approximation (BA), as in this case the existence of a reflected beam from the substrate causes the diffraction pattern to deviate significantly from the simple Fourier transform of the object. Detailed computer simulations show that the algorithm works. Verification with real experiments is planned.