Synchronization in pairs of opto-thermally driven mechanically coupled micro-oscillators

TL;DR

This paper investigates synchronization phenomena in pairs of silicon micro-oscillators driven by laser, analyzing how mechanical coupling and frequency detuning influence their synchronized states through experiments and numerical modeling.

Contribution

It introduces a combined experimental and numerical study of synchronization in opto-thermally driven micro-oscillators, highlighting different synchronization states and phase relationships.

Findings

Identification of three oscillation states: drift, quasi-periodic, and synchronized.

Observation of in-phase and out-of-phase synchronization depending on parameters.

Comparison of experimental results with numerical lumped-parameter model.

Abstract

We study the phenomenon of synchronization in pairs of doubly clamped, mechanically coupled silicon micro-oscillators. A continuous-wave laser beam is used to drive the micro-beams into limit cycle oscillations and to detect the oscillations using interferometry. Devices of different dimensions are used to introduce frequency detuning, and short silicon bridges connecting the micro-beams are used as mechanical coupling between the oscillators. The region of synchronization is plotted for the MEMS system in the detuning vs. coupling parameter space and compared with the numerical analysis of a corresponding, lumped-parameter model. Three states of oscillations are observed i.e. the drift state, quasi-periodic state, and the synchronized state. The numerical model also distinguishes between in-phase and out-of-phase synchronization where out-of-phase synchronization is observed at low coupling strengths and low frequency detuning.