Cavity-Enhanced 2D Material Quantum Emitters Deterministically Integrated with Silicon Nitride Microresonators

TL;DR

This paper demonstrates a CMOS-compatible method to integrate 2D material quantum emitters with silicon nitride microresonators, achieving high Purcell enhancement and precise positioning for scalable quantum photonic applications.

Contribution

It introduces a novel deterministic integration technique of 2D quantum emitters with silicon nitride resonators, significantly improving coupling efficiency and positioning accuracy.

Findings

Achieved up to 46% spectral coupling efficiency at room temperature.

Demonstrated no degradation of optical properties after fabrication.

Achieved 100 nm positioning accuracy of emitters within waveguides.

Abstract

Optically active defects in 2D materials, such as hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDs), are an attractive class of single-photon emitters with high brightness, room-temperature operation, site-specific engineering of emitter arrays, and tunability with external strain and electric fields. In this work, we demonstrate a novel approach to precisely align and embed hBN and TMDs within background-free silicon nitride microring resonators. Through the Purcell effect, high-purity hBN emitters exhibit a cavity-enhanced spectral coupling efficiency up to $46\%$ at room temperature, which exceeds the theoretical limit for cavity-free waveguide-emitter coupling and previous demonstrations by nearly an order-of-magnitude. The devices are fabricated with a CMOS-compatible process and exhibit no degradation of the 2D material optical properties, robustness to thermal annealing, and 100 nm positioning accuracy of quantum emitters within single-mode waveguides, opening a path for scalable quantum photonic chips with on-demand single-photon sources.