A Novel Buckle-Free Large Rib Microdisk with Sub-Micron Thickness

TL;DR

This paper presents a new rib disk design that prevents buckling in large, thin microdisks, enabling high-quality optical microcavities suitable for visible to UV microcomb applications.

Contribution

The authors introduce a novel rib disk structure that effectively mitigates buckling in large, thin microdisks, achieving high optical quality factors.

Findings

Achieved buckle-free microdisks with sub-micron thickness.

High optical quality factor exceeding 10^7.

Microdisks are millimeter-sized, suitable for dense spectral microcomb generation.

Abstract

Thin large microdisks, that are key for dense spectral microcomb generation at visible to UV wavelengths, face challenges in fabrication. One of the most difficult issues is the buckling effect that significantly reduces the cavity optical quality factor. This work introduces a novel rib disk structure that significantly mitigates the buckling effects. Using this approach, we obtained millimeter size buckle-free microdisks with sub-micron thickness and high optical quality factor exceeding $10^7$.