Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing

TL;DR

This paper introduces an imaging scatterometer designed to observe optical coating changes during air annealing, providing real-time insights into how annealing affects scattering and damage.

Contribution

The paper presents a novel imaging scatterometer setup that enables in-situ observation of optical coating behavior during air annealing processes.

Findings

Air annealing reduces coating absorption and scattering.

The instrument detects coating damage during annealing.

Real-time imaging correlates annealing conditions with coating quality.

Abstract

Air annealing generally reduces absorption, scattering, and mechanical loss in amorphous coatings up to temperatures where damage occurs. Our instrument uses an industrial oven with viewports to observe coating scatter and damage during annealing.