Gentle patterning approaches towards compatibility with bio-organic materials and their environmental aspects
Artem K. Grebenko, Konstantin A. Motovilov, Anton V. Bubis, Albert G., Nasibulin

TL;DR
This paper reviews recent patterning techniques that are compatible with bio-organic materials and environmentally friendly, emphasizing their importance for bio-electronic applications and sustainable manufacturing.
Contribution
It provides a comprehensive overview of delicate bio-organic materials and innovative lithographic methods designed for eco-friendly and compatible nano- and micro-patterning.
Findings
Identification of patterning techniques compatible with bio-organic materials
Assessment of environmental impacts of various lithographic methods
Highlighting the importance of eco-friendly approaches in bio-electronic device fabrication
Abstract
Advances in material science, bio-electronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micro-patterning techniques. Overall, the importance of creating micro and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components is recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, we briefly review…
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