Electron Emission Regimes of Planar Nano Vacuum Emitters
Marco Turchetti, Yujia Yang, Mina R. Bionta, Alberto Nardi, Luca, Daniel, Karl K. Berggren, and Phillip D. Keathley

TL;DR
This paper systematically investigates electron emission regimes in planar nano vacuum diodes, identifying three distinct emission mechanisms and enabling improved modeling for high-speed, low-power nanoelectronic applications.
Contribution
It provides the first comprehensive analysis of multiple emission regimes within a single nano vacuum diode, clarifying the interplay between different electron emission mechanisms.
Findings
Identified three emission regimes: Schottky, Fowler-Nordheim, and saturation.
Demonstrated consistency across different materials and environmental conditions.
Enabled accurate modeling for future high-speed nanoelectronic devices.
Abstract
Recent advancements in nanofabrication have enabled the creation of vacuum electronic devices with nanoscale free space gaps. These nanoelectronic devices promise the benefits of cold-field emission and transport through free-space, such as high nonlinearity and relative insensitivity to temperature and ionizing radiation, all the while drastically reducing the footprint, increasing the operating bandwidth and reducing the power consumption of each device. Furthermore, planarized vacuum nanoelectronics could easily be integrated at scale similar to typical micro and nanoscale semiconductor electronics. However, the interplay between different electron emission mechanisms from these devices are not well understood, and inconsistencies with pure Fowler-Nordheim emission have been noted by others. In this work, we systematically study the current-voltage characteristics of planar vacuum…
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