Resistively loaded coplanar waveguide for microwave measurements of induced carriers

TL;DR

This paper introduces a resistively loaded coplanar waveguide (RLCPW) technique for microwave measurements of two-dimensional electron systems, enabling precise control and characterization of induced carriers.

Contribution

The paper presents the design, fabrication, and application of RLCPW for measuring 2DES, including a model to convert microwave data into conductivity, advancing microwave measurement methods.

Findings

Successful measurement of 2DES conductivity using RLCPW

Demonstration on Si MOSFETs shows effective carrier control

Model accurately relates microwave transmission to conductivity

Abstract

We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.