Optical properties of Au-Hf thin films
Hugh Littlehailes, William R. Hendren, Robert M. Bowman, and Fumin, Huang

TL;DR
This study experimentally investigates the optical properties of Au-Hf thin films, revealing their plasmonic behavior, phase composition dependence on deposition conditions, and stability issues related to oxidation, with potential implications for optical applications.
Contribution
First experimental analysis of Au-Hf thin films' optical properties, identifying phase formation conditions and stability challenges for plasmonic applications.
Findings
Au-Hf films exhibit negative permittivity and plasmonic properties.
Phase composition depends on deposition temperature, with pure Au3Hf forming above 400°C.
Oxidation resistance is limited at higher vacuum levels, affecting stability.
Abstract
The optical properties of thin films of intermetallic AuHf were experimentally investigated for the first time, which display clear plasmonic properties in the optical and near infrared region with negative permittivity. In contrast to similar alloys, such as films of AuZr, the films express more negative values and lower values across most of the wavelengths (370-1570 nm) investigated. The AuHf films were fabricated by DC magnetron sputtering at a range of deposition temperatures, from room temperature to 415C, and annealed at different vacuum levels. The films mostly formed as a combination of AuHf, AuHf and AuHf phases when deposited below 400C, and exclusively AuHf phase at above 400C, indicating key conditions for isolating this phase. The films were stable when annealed at 10 Torr, but when…
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Taxonomy
TopicsSemiconductor materials and interfaces · Metal and Thin Film Mechanics · Copper Interconnects and Reliability
