Design of a SOIMUMPs Inertial Sensor and readout Charge Amplifier
H\'elder Campos, Nuno Paulino, Jo\~ao F. Loureiro
TL;DR
This paper details the design and simulation of a MEMS-based inertial accelerometer with a CMOS charge amplifier, achieving specific dynamic range, bandwidth, and resolution specifications.
Contribution
It introduces a combined MEMS mechanical sensor and CMOS charge amplifier designed for SOIMUMPs and AMS 0.35um processes, with detailed post-layout simulation results.
Findings
Dynamic range of +/-5G
Bandwidth of 1.58 kHz
Resolution of 10.5 μG/Hz^0.5
Abstract
This paper presents the design and post-layout characteristics of a differential capacitance based inertial accelerometer This includes a MEMS based mechanical sensing element and a CMOS charge amplifier, which is the first stage of a readout circuit. The mechanical sensor is designed according to the SOIMUMPs fabrication process technology, and the readout circuit targeted AMS 0.35um technology. Post layout simulations indicated a +/-5G dynamic range, a maximum bandwidth of 1.58 kHz, non-linearity of 0.077% and a resolution of 10.5 uG/Hz^0.5. The readout circuit charge amplifier is fully differential and incorporated in a switched capacitor (SC) topology with CDS.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Photonic and Optical Devices