On the correlation of angular distributions of keV ions and trajectory-dependent electronic excitations in transmission channelling geometry
Radek Hole\v{n}\'ak, Svenja Lohmann, Kristina Komander, Daniel, Primetzhofer

TL;DR
This study investigates how the angular distribution of keV ions transmitted through silicon relates to electronic energy loss, using energy discrimination and simulations to distinguish between channeled and dechanneled trajectories.
Contribution
It introduces a method to correlate angular distributions with trajectory-dependent electronic excitations in transmission channelling using energy discrimination and Monte Carlo simulations.
Findings
Angular distributions reveal distinct patterns for channeled and dechanneled ions.
Energy loss correlates with specific angular distribution features.
Simulations agree with experimental angular distribution data.
Abstract
We use energy discrimination of keV ions transmitted through a thin, single-crystalline silicon membrane to correlate specific angular distribution patterns formed in channelling geometry with trajectory-dependent electronic energy loss. The integral energy and intensity distribution of transmitted ions can thus be dissected into on one side axially channelled projectiles travelling along rather straight trajectories and on the other side dechannelled projectiles predominantly experiencing blocking. Angular distributions of transmitted ions are further simulated with two different Monte-Carlo codes.
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Taxonomy
TopicsIon-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Radiation Detection and Scintillator Technologies
