Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy

TL;DR

This paper presents a rapid, in situ method using scanning moiré fringe imaging in STEM to determine sample thickness, especially beneficial for beam-sensitive materials like MOFs.

Contribution

Introduces a novel in situ thickness measurement technique in STEM based on focal-series SMF imaging, reducing beam damage and contamination.

Findings

Fast and convenient thickness determination in TEM.

Effective for beam-sensitive materials like MOFs.

Reduces beam damage during measurement.

Abstract

Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging, for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for determining thickness in scanning transmission electron microscopy (STEM) mode based on scanning moir\'e fringe (SMF). Sample thickness can be determined in situ in the medium magnification using focal-series SMF imaging, with beam damage and contamination avoided to a large extent. This method provides a fast and convenient way for determining thickness in TEM imaging, which is particularly useful for beam-sensitive materials such as Metal-Organic Frameworks.