Design and Modification of MEMS Based Micro Cantilever
Tejas S. Fanse

TL;DR
This paper reviews the design of MEMS-based micro cantilever sensors for disease detection, demonstrating how their mechanical properties can be optimized for early medical diagnosis using simulation tools.
Contribution
It introduces a micro cantilever sensor design using MEMS technology and analyzes its mechanical behavior for potential biomedical applications.
Findings
Sensitivity and deflection can be tuned for detecting disease molecules
Simulation results show potential for early disease diagnosis
Design modifications improve sensor performance
Abstract
: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of Researchers as well as Doctors. Thus, in this paper our main focus is to review about all these problems and give some solution. In order to do so here with proposed a micro cantilever-based sensor using MEMS technology in COMSOL Multiphysics environment using FEM. Analysis of Micro Cantilever sensor and its mechanical behavior as well as changing properties by changing in few parameters it has been observed that sensitivity and its deflection can be utilize to detect the different disease molecules and helpful for early detection. In this way it can be a helpful tool in the field of medical science.
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Taxonomy
TopicsMechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Force Microscopy Techniques and Applications
