A capacitive flexible tactile sensor

TL;DR

This paper presents a novel capacitive flexible tactile sensor designed with MEMS technology, featuring a 4x4 array structure that demonstrates high sensitivity and fast response times in pressure measurement applications.

Contribution

The paper introduces a new design for a capacitive flexible tactile sensor with optimized layer thickness and density, improving sensitivity and response speed.

Findings

Optimal intermediate layer thickness of 2 mm enhances sensitivity.

Sensor exhibits fast response and rebound times.

The 4x4 array structure effectively measures object pressure.

Abstract

In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile sensing unit of the sensor. The structure of capacitive flexible tactile sensor was designed and an experimental platform was established to test the performance. The tests show that when the thickness of the intermediate layer is 2 mm and the density is medium, the sensor's sensitivity is the best while the time of both the response and the rebound is fast.