Room-temperature silicon platform for GHz-frequency nano-electro-opto-mechanical systems

TL;DR

This paper introduces a CMOS-compatible silicon platform for nano-electro-opto-mechanical systems operating at room temperature and GHz frequencies, enabling integrated, high-sensitivity signal processing for classical and quantum applications.

Contribution

It presents a novel CMOS-compatible platform with piezoelectric transducers and nanocrystalline silicon nanobeams for integrated nano-electro-opto-mechanical systems.

Findings

Devices operate at 2 GHz at room temperature

Peak sensitivity down to 2.6 cavity phonons

Platform compatible with silicon photonics and MEMS

Abstract

Nano-electro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus hindering mass-scale utilization. We have developed a CMOS technology platform for nano-electro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for enhanced optomechanical interaction. Room temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.