Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon
S. Kalem, R. Mostefaoui, J. Bourneix, J. Chevallier
TL;DR
This paper investigates how infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films change with chlorine content and annealing temperature, revealing chemical transformations and bonding configurations.
Contribution
It provides detailed analysis of spectral evolution and identifies specific silicon-chlorine-hydrogen species formed during annealing.
Findings
Increased chlorine raises the 2100 cm-1 band, indicating SiH2CI2 presence.
The Sic1 stretching band shifts from 545 to 590 cm-1 with annealing.
Transformation from SiCl2 to SiCl and SiCl4 occurs above 700°C.
Abstract
The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiH2CI2, mixed configurations. The Sic1 stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590 cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCI2, species around 500{\deg}C and their transformation to SiCl, species and SiCl, molecules above 700{\deg}C.
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