Addressing the anomalies in determining negative ion parameters using electrostatic probes

TL;DR

This paper reviews the challenges and inaccuracies in using electrostatic probes to measure negative ion density and temperature in electronegative plasmas, and proposes correction methods to address these anomalies.

Contribution

It introduces correction techniques for electrostatic probe measurements to improve accuracy in determining negative ion parameters in electronegative discharges.

Findings

Identifies key inaccuracies in probe-based measurements

Proposes correction methods for sheath and charge collection issues

Enhances reliability of negative ion parameter determination

Abstract

The negative ion density and temperature are the two fundamental parameters that are necessary to quantify the properties of electronegative discharges. However, determining these parameters by means of electrostatic probes can be quite challenging because of the inherent inaccuracies involved in determining the electron/ion saturation currents, electron temperatures and plasma potential, which relies on charge particle collection by the probe surface; as well as on the sheath models that are originally developed for an ideal collision-less plasma. This paper briefly reviews the various limitations associated with these underlying methods and suggests useful means to correct the anomaly associated in determining the negative ion parameters based on electrostatic probes.