A Numerical Analysis of a Micro-scale Piezoelectric Cantilever Beam: the Effect of Dimension Parameters on the Eigen Frequency

TL;DR

This study uses finite element analysis to examine how the dimensions of a silicon micro-scale piezoelectric cantilever beam influence its eigen frequency, highlighting the effects of length, thickness, and width.

Contribution

It provides a detailed numerical analysis of how specific dimension parameters affect the eigen frequency of micro-scale piezoelectric beams, which was not comprehensively studied before.

Findings

Length and thickness have a continuous effect on eigen frequency.

Width's effect on eigen frequency is discontinuous.

Finite element analysis effectively models the influence of dimensions.

Abstract

Eigen frequency is one of the most important system responses to be considered while designing a micro-scale piezoelectric cantilever beam. This paper investigates and analyzes the effect of dimension parameters of a micro-scale piezoelectric cantilever beam on its eigen frequency. The beam is assumed to be made of silicon. Structural mechanics based finite element analysis is carried out in the environment of COMSOL Multiphysics software for the study. It is seen that length and thickness have continuous effect on the eigen frequency; whereas, the effect of width is discontinuous.