MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets

TL;DR

This paper introduces a novel MEMS magnetometer that integrates magnetic flux concentrators and permanent magnets, inspired by magnetic force microscopy, aiming for low power and high performance.

Contribution

It presents the design, analytical modeling, and initial characterization of a new MEMS magnetometer combining magnetic elements with standard MEMS technology.

Findings

Analytical model of the magnetometer is developed.

Proof-of-concept device demonstrates potential for high performance.

Device design suggests low power consumption.

Abstract

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.