Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer

TL;DR

This study investigates how a HfO2 buffer layer affects the superconducting properties of NbN films deposited via reactive magnetron sputtering, providing new insights into film morphology and microstructure.

Contribution

It is the first comprehensive analysis of how hafnia dielectric buffer layers influence the superconducting, morphological, and microstructural properties of NbN films.

Findings

HfO2 buffer layer modifies NbN film morphology

Superconducting properties are affected by the buffer layer

Microstructural characteristics are linked to buffer layer presence

Abstract

The influence of the buffer layer of hafnia dielectric on superconducting properties of niobium nitride films, produced by the technique of the reactive magnetron depositing has been investigated for the first time. This study presents a comprehensive analysis of morphological, microstructural, and electrophysical parameters of thin NbN films.