A Low-Power Optical Electron Switch
Wayne Cheng-Wei Huang, Roger Bach, Peter Beierle, Herman Batelaan

TL;DR
This paper demonstrates a low-power optical electron switch using silicon nitride that deflects electron beams with laser illumination, offering a new method for controlling electron beams in lithography and microscopy.
Contribution
It introduces a novel optical electron switch that uses low-power laser illumination to control electron beam deflection, with fast switching capabilities.
Findings
Achieved a deflection angle of up to 1.2 mrad.
Demonstrated a switch rise and fall time of 6 microseconds.
Showed potential applications in electron lithography and microscopy.
Abstract
An electron beam is deflected when it passes over a silicon nitride surface, if the surface is illuminated by a low-power continuous-wave diode laser. A deflection angle of up-to is achieved for an electron beam of divergence. A mechanical beam-stop is used to demonstrate that the effect can act as an optical electron switch with a rise and fall time of . Such a switch provides an alternative means to control electron beams, which may be useful in electron lithography and microscopy.
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