Peculiarities and evolution of Raman spectra of multilayer Ge/Si(001) heterostructures containing arrays of low-temperature MBE-grown Ge quantum dots of different size and number density: Experimental studies and numerical simulations

TL;DR

This study investigates how the Raman spectra of multilayer Ge/Si(001) heterostructures with quantum dots vary with Ge layer thickness, revealing features linked to strain, composition, and layer flatness, supported by experiments and simulations.

Contribution

It provides new insights into the peculiar Raman spectral features of Ge/Si heterostructures and explains their dependence on layer thickness through experimental and numerical analysis.

Findings

Raman spectra show significant intensity increases at 10 Å Ge layers.

Anomalous shifts and broadening occur at 8-9 Å Ge layers.

The behavior is linked to layer flatness and stress-induced diffusion.

Abstract

Ge/Si(001) multilayer heterostructures containing arrays of low-temperature self-assembled Ge quantum dots and very thin Si$_x$Ge$_{1-x}$ layers of varying composition and complex geometry have been studied using Raman spectroscopy and scanning tunneling microscopy. The dependence of Raman spectra on the effective thickness of deposited Ge layers has been investigated in detail in the range from 4 to 18 \r{A}. The position and shape of both Ge and SiGe vibrational modes are of great interest since they are closely related to the strain and composition of the material that plays a role of active component in perspective optoelectronic devices based on such structures. In this work, we present an explanation for some peculiar features of Raman spectra, which makes it possible to control the quality of the grown heterostructures more effectively. A dramatic increase of intensity of both the Ge$-$Ge and Si$-$Ge bands for the structure containing Ge layers of 10 \r{A} and anomalous shift and broadening of the Si$-$Ge band for structures comprising Ge layers of 8 and 9 \r{A} thick were observed. In our model, the anomalous behavior of the Raman spectra with the change of thickness of deposited Ge is connected with the flatness of Ge layers as well as transitional SiGe domains formed via the stress-induced diffusion from {105} facets of quantum dots. The conclusions are supported by the STM studies and the numerical calculations.