Development of All-Diamond Scanning Probes Based on Faraday Cage Angled Etching Techniques

TL;DR

This paper introduces a novel fabrication method for diamond scanning probes using Faraday cage angled etching, enabling more complex geometries and improved performance for applications like NV centre magnetometry.

Contribution

It presents a new FCAE-based fabrication technique for diamond probes, overcoming limitations of traditional methods in structure complexity and aspect ratio.

Findings

FCAE allows for higher aspect ratio diamond structures.

Prototypes demonstrate feasibility for scanning probe applications.

Comparison shows advantages over conventional fabrication methods.

Abstract

We are proposing a novel fabrication method for single crystal diamond scanning probes, exploiting the method of Faraday cage angled etching (FCAE). Electron-beam lithography (EBL) and inductively coupled plasma (ICP) etching as state-of-the-art method is often limiting the achievable diamond structure geometries in aspect ratio and complexity. This poses challenges, e.g., for realizing nitrogen vacancy (NV) centre magnetometry scanning probes. Combining a planar design with FCAE offers several advantages over the established fabrication technology of nano-opto-mechanical diamond devices. Here, we report on the direct comparison of both approaches and present first proof-of-concept FCAE-prototypes for scanning probe applications.