Ultrahigh Q SOI Ring Resonator With Strip Waveguide

TL;DR

This paper presents the design and experimental validation of an ultra-high-Q silicon ring resonator with single-mode operation, suitable for photon gyroscopes, achieving a Q factor of 1.54 million.

Contribution

It introduces a novel large-area silicon ring resonator with ultra-high Q and single-mode operation based on strip waveguides, with both simulation and experimental results.

Findings

Achieved an experimental Q factor of 1.54 million.

Demonstrated a resonance depth of 0.9810 in experiments.

Designed a resonator with a free spectrum range of 0.036nm.

Abstract

The design and experimental demonstration of a large-area, ultra-high-Q-factor and single-mode operation silicon ring resonator based on a strip silicon photonic waveguide are presented, which is suitable for photon gyroscopic application. Based on these designs, simulation results show that the resonance depth is 0.9979 while the resonator is in an undercoupled state with the coupling length L=2um and coupling gap d=0.2um. For the fabricated resonator, the ultrahigh Q factor of 1.54*106 is experimentally demonstrated, with the free spectrum range (FSR) of 0.036nm and the resonance depth is 0.9810.