Characterization of angularly resolved EUV emission from 2-$\mu$m-wavelength laser-driven Sn plasmas using preformed liquid disk targets

TL;DR

This study investigates the EUV emission characteristics of laser-driven tin plasmas from liquid disk targets using 2-μm laser pulses, revealing enhanced emission control and performance compared to 1-μm lasers, with implications for high-power EUV sources.

Contribution

It demonstrates the improved EUV emission efficiency and anisotropy control of 2-μm laser-driven tin plasmas from liquid disk targets over 1-μm lasers, advancing high-power EUV source development.

Findings

EUV emission efficiency depends on laser-target overlap.

Angular emission distribution is nearly independent of laser intensity and duration.

2-μm laser-driven plasmas show less self-absorption than 1-μm plasmas.

Abstract

The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2-$\mu$m-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse laser is first used to deform tin microdroplets into thin, extended disks before the main (2$\mu$m) pulse creates the EUV-emitting plasma. Irradiating 30- to 300-$\mu$m-diameter targets with 2-$\mu$m laser pulses, we find that the efficiency in creating EUV light around 13.5nm follows the fraction of laser light that overlaps with the target. Next, the effects of a change in 2-$\mu$m drive laser intensity (0.6-1.8$\times 10^{11}$W/cm$^2$) and pulse duration (3.7-7.4ns) are studied. It is found that the angular dependence of the emission of light within a 2\% bandwidth around 13.5nm and within the backward 2$\pi$ hemisphere around the incoming laser beam is almost independent of intensity and duration of the 2-$\mu$m drive laser. With increasing target diameter, the emission in this 2\% bandwidth becomes increasingly anisotropic, with a greater fraction of light being emitted into the hemisphere of the incoming laser beam. For direct comparison, a similar set of experiments is performed with a 1-$\mu$m-wavelength drive laser. Emission spectra, recorded in a 5.5-25.5nm wavelength range, show significant self-absorption of light around 13.5nm in the 1-$\mu$m case, while in the 2-$\mu$m case only an opacity-related broadening of the spectral feature at 13.5nm is observed. This work demonstrates the enhanced capabilities and performance of 2-$\mu$m-driven plasmas produced from disk targets when compared to 1-$\mu$m-driven plasmas, providing strong motivation for the use of 2-$\mu$m lasers as drive lasers in future high-power sources of EUV light.