Visible and Near-infrared Microdisk Resonators on a 4H-Silicon-Carbide-on-Insulator Platform

TL;DR

This paper demonstrates the fabrication of visible and near-infrared microdisk resonators on a 4H-Silicon-Carbide-on-Insulator platform, supporting high-quality whispering-gallery modes suitable for quantum photonics applications.

Contribution

It introduces a novel fabrication of microdisk resonators on 4H-SiCOI with high Q-factors and mode volumes, compatible with quantum defect lines.

Findings

Supported WGMs with Q up to 5.25 x 10^3

Achieved mode volumes down to 2.69 x (λ/n)^3

Resonant wavelengths align with spin defect lines

Abstract

Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-oninsulator platform (4H-SiCOI). By carrying out microphotoluminescence measurements at room temperature, we show that the microdisk resonators support whispering-gallery modes (WGMs) with quality factors up to $5.25 \times 10^3$ and mode volumes down to $2.69 \times(\lambda /n)^3$ at the visible and near-infrared wavelengths. Moreover, the demonstrated wavelength-sized microdisk resonators exhibit WGMs whose resonant wavelengths compatible with the zero-phonon lines of spin defects in 4H-SiCOI, making them a promising candidate for applications in cavity quantum electrodynamics and integrated quantum photonic circuits.