Scalable and Deterministic Fabrication of Quantum Emitter Arrays from Hexagonal Boron Nitride

TL;DR

This paper presents a scalable, deterministic method for fabricating large arrays of quantum emitters in hexagonal boron nitride, enabling high-throughput quantum photonic device production.

Contribution

It introduces a bottom-up growth technique on nanoscale dielectric pillars to produce large-scale, spatially-controlled arrays of single photon emitters in hBN.

Findings

Near-unity yield of single emitters at 250 nm pillar diameter

Statistical analysis confirms critical role of pillar size

Method enables scalable fabrication of quantum emitter arrays

Abstract

We demonstrate the fabrication of large-scale arrays of single photon emitters (SPEs) in hexagonal boron nitride (hBN). Bottom-up growth of hBN onto nanoscale arrays of dielectric pillars yields corresponding arrays of hBN emitters at the pillar sites. Statistical analysis shows that the pillar diameter is critical for isolating single defects, and diameters of ~250 nm produce a near-unity yield of a single emitter at each pillar site. Our results constitute a promising route towards spatially-controlled generation of hBN SPEs and provide an effective and efficient method to create large scale SPE arrays. The results pave the way to scalability and high throughput fabrication of SPEs for advanced quantum photonic applications.