Nanofabrication of high Q, transferable, diamond resonators

TL;DR

This paper introduces a reliable nanofabrication method for high-Q diamond resonators using tungsten masks, enabling transferability and integration into quantum photonic circuits.

Contribution

The authors develop a novel fabrication protocol employing tungsten masks for high-quality diamond resonators, enhancing repeatability and enabling transfer onto different substrates.

Findings

Achieved diamond cavities with Q factors approaching 10^4.

Demonstrated transfer of cavities onto trenched substrates.

Established a reproducible fabrication process using tungsten masks.

Abstract

Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components, including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q factors) approaching 10$^$4. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.