Modelling and observation of nonlinear damping in dissipation-diluted nanomechanical resonators

TL;DR

This paper investigates nonlinear dissipation in high-quality nanomechanical resonators, introducing a theoretical model and experimental validation to understand how nonlinear effects influence dissipation dilution and device performance.

Contribution

It presents a new analytical and numerical model for nonlinear dissipation in stressed nanomechanical resonators, validated by experiments on silicon nitride membranes.

Findings

Good agreement between model and experiments for low-order modes

Quantitative links between nonlinearities and dissipation dilution

Insights for future device design and performance diagnosis

Abstract

Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von K\'arm\'an theory, which can be numerically evaluated using finite-element models for arbitrary geometries. We use this approach to predict nonlinear loss and (Duffing) frequency shift in ultracoherent phononic membrane resonators. A set of systematic measurements with silicon nitride membranes shows good agreement with the model for low-order soft-clamped modes. Our analysis also reveals quantitative connections between these nonlinearities and dissipation dilution. This is of interest for future device design, and can provide important insight when diagnosing the performance of dissipation dilution in an experimental setting.