Computer-readable Image Markers for Automated Registration in Correlative Microscopy autoCRIM

TL;DR

This paper introduces a novel methodology using computer-readable fiducial markers for automatic registration of images from multiple microscopy modalities, enabling detailed correlative analysis and 3D surface modeling at nanometre resolution.

Contribution

The paper presents a new approach for automatic image registration across various microscopy techniques using computer-readable markers, enhancing correlative microscopy capabilities.

Findings

Enables seamless navigation between different imaging modalities.

Allows integration of data from SEM, SIMS, XPS, AFM, and optical tools.

Facilitates creation of comprehensive 3D surface models.

Abstract

We present a newly developed methodology using computer-readable fiducial markers to allow images from multiple imaging modalities to be registered automatically. This methodology makes it possible to correlate images from many surface imaging techniques to provide an unprecedented level of surface detail on a nanometre scale that no one technique can provide alone. This methodology provides the capability to navigate to specific areas of interest when transferring samples from machine to machine seamlessly. Then taking data acquired from Scanning Electron Microscope (SEM), Secondary Ion Mass Spectrometry (SIMS), x-ray Photoelectron Spectroscopy (XPS), Atomic Force Microscopy (AFM) and optical inspection tools and combining all the data acquired to then generate a 3D data representative model of a surface.