Development, Processing and Applications of a UV-Curable Polymer with Surface Active Thiol Groups
Manuel M\"uller, Rukan Nasri, Lars Tiemann, Irene Fernandez-Cuesta

TL;DR
This paper introduces a novel UV-curable polymer with surface-active thiol groups, enabling micro- and nanoscale patterning, surface modifications, and improved electrical properties in graphene devices, with potential for versatile applications.
Contribution
The development of a UV-curable polymer with surface thiol groups that can be patterned and chemically modified for advanced electronic and surface applications.
Findings
Polymer is highly transparent and hydrophilic.
Surface thiol groups enable direct thiol-ene chemistry.
Improves electrical performance of graphene FETs.
Abstract
We present here a novel resist formulation with active thiol groups at the surface. The material is UV curable, and can be patterned at the micro- and nanoscale by UV nanoimprint lithography. The resist formulation development, its processing, patterning and surface characterization are presented here. In addition, a possible application, including its use to modify the electrical properties of graphene devices is shown. The cured material is highly transparent, intrinsically hydrophilic and can be made more hydrophilic following a UV-ozone or an O2 plasma activation. We evaluated the hydrophilicity of the polymer for different polymer formulations and curing conditions. In addition, a protocol for patterning of the polymer in the micro and nanoscale by nanoimprinting is given and preliminary etching rates together with the polymer selectivity are measured. The main characteristic and…
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