Alumina coating for dispersion management in ultra-high Q microresonators
Marvyn Inga, La\'is Fujii, Jos\'e Maria C. da Silva Filho, Jo\~ao, Henrique Q. Palhares, Andre S. Ferlauto, Francisco C. Marques, Thiago P., Mayer Alegre, and Gustavo S. Wiederhecker

TL;DR
This paper demonstrates that conformal alumina coatings on silica microspheres can precisely engineer group-velocity dispersion while maintaining ultra-high quality factors, enabling advanced nonlinear optical applications like Kerr frequency combs.
Contribution
The study introduces a nanometric alumina coating technique via atomic layer deposition to finely tune dispersion in silica microresonators without degrading their high Q factors.
Findings
Alumina coating preserves ultra-high Q (~10^7) in silica microspheres.
Coating allows precise control of group-velocity dispersion.
Kerr frequency combs are successfully generated using coated microspheres.
Abstract
Silica optical microspheres often exhibit ultra-high quality factors, yet, their group velocity dispersion, which is crucial for nonlinear optics applications, can only be coarsely tuned. We experimentally demonstrate that group-velocity dispersion of a silica microsphere can be engineered by coating it with conformal nanometric layers of alumina, yet preserving its ultra-high optical quality factors (\num{\sim e7}) at telecom wavelengths. Using the atomic layer deposition technique for the dielectric coating, which ensures nm-level thickness control, we not only achieve a fine dispersion tailoring but also maintain a low surface roughness and material absorption to ensure a low optical loss. Numerical simulations supporting our experimental results show that the alumina layer thickness is a promising technique for precise tuning of group-velocity dispersion. As an application we…
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