Dynamic analysis of tapping-mode AFM with sidewall probe subjected to effects of probe mass and sidewall extension

TL;DR

This study develops an analytical model to analyze how probe mass, sidewall extension, and tip-sample interactions affect the dynamics of AFM with sidewall probes, validated against existing simulation data.

Contribution

It introduces a new analytical approach to understand the influence of probe and sidewall parameters on AFM-SW dynamics, which was not previously modeled in detail.

Findings

Resonance frequency declines with increased probe mass.

Longer sidewall beams amplify the probe's effect on resonance frequency.

Tip-sample interactions further reduce resonance frequency, especially with higher probe mass.

Abstract

Atomic Force Microscopy with SideWall (AFM SW) is widely used for nano-scale surface measurements at side surfaces. In the current study, by taking into consideration the effects of sidewall beam and its probe, an analytical method is developed to explore the dynamics of AFM-SW. The effect of probe mass, sidewall extension length, and tip sample interactions on the resonance frequencies and amplitude of Micro-Cantilever is widely investigated. The obtained results of the analytical model demonstrate the significant effect of these parameters on the dynamics of AFM-SW. To verify the accuracy of the analytical model, the obtained results are compared against the simulation data of previously published works and a good agreement is observed. Resonance Frequency (RF) of cantilever clearly declines when the mass of probe is taken to account, especially in higher RFs. Besides, probe effect on RF is higher when sidewall beam is longer. Resonance frequency decreases when tip-sample interaction or probe mass is high, yet the amount of reduction is intensified when probe mass and interaction together are at higher point. An analytical method is developed to explore the dynamics of Atomic Force Microscopy with considering SideWall beam effects (AFM-SW). The effect of probe mass, sidewall extension length, and tip sample interactions on vibration of micro-cantilever is investigated. The obtained results are compared with previous literatures. The results show that Resonance Frequency (RF) of cantilever declines when the mass of probe is taken to account. Besides, probe effect on RF is higher when sidewall beam is longer. Resonance frequency decreases when tip-sample interaction or probe mass is high, yet the amount of reduction is intensified when they are at higher point.