Metasurfaces for the Infrared Spectral Range Fabricated Using Two-Photon Polymerization

TL;DR

This paper presents a cost-effective, rapid, maskless fabrication method for infrared-range metasurfaces using two-photon polymerization, enabling high-fidelity 2D pattern production for various optical applications.

Contribution

It introduces a simple three-step process for fabricating gold bar metasurfaces without complex lithography, suitable for chemical sensing and beam steering.

Findings

Multiple infrared resonances observed, including substrate phonon coupling.

High fidelity 2D patterns achieved for metasurface applications.

The method reduces fabrication time and cost.

Abstract

Fabrication of metasurfaces is ofthen time consuming and expensive, involving complex lithographic processes. The maskless fabrication of metasurfaces composed of rectangular Au bars is reported as a suitable alternative, providing cost-effective, rapid prototyping of metasurfaces. The investigated metasurfaces were fabricated using a simple three-step process which is discussed in detail. The fabrication process establishes a simple method for producing high fidelity 2D patterns suitable to synthesize metasurfaces for chemical sensing, beam steering, and perfect reflection/transmission. Comprehensive polarization-sensitive reflection data reveal multiple resonances in the infrared spectral range. In addition to the dipole and substrate resonances, a resonance which is attributed to a coupling between the excitation of the metasurface and the substrate phonon mode is observed.