Determination of the sheet resistance of an infinite thin plate with five point contacts located at arbitrary positions

TL;DR

This paper introduces a five-probe method for measuring sheet resistance in an infinite thin plate that remains accurate regardless of probe placement, useful for micro- and nanometric applications.

Contribution

It presents a novel five-probe measurement technique that is independent of probe positions for an infinite homogeneous plane.

Findings

Method is strictly valid for an infinite homogeneous plane.

Potential applications as a standard for sheet resistance measurement.

Effective for layers on objects with spherical topology.

Abstract

In this paper, a five-probe method of sheet resistance measurement that is independent of probe positions is reported. The method is strict for an infinite homogeneous plane. It has potential applications as a sheet resistance standard based on planar molecular layers. The method can be used to measure the sheet resistance of layers covering objects with a spherical topology, particularly on micro- and nanometric scales, where it is difficult to control probe positioning.