Multiobjective optimization in design of broadband extreme ultraviolet multilayers

TL;DR

This paper enhances multiobjective genetic algorithms to design broadband EUV multilayers, enabling optimal trade-offs among conflicting objectives and guiding solutions toward desired regions for improved optical performance.

Contribution

The paper introduces improved multiobjective genetic algorithms with reference directions for more effective design of broadband EUV multilayers with multiple objectives.

Findings

Successfully obtained multilayer designs with critical average reflectivities.

Guided the search process to desired solution regions.

Demonstrated potential for designing multilayers with more objectives.

Abstract

In order to design broadband extreme ultraviolet multilayers with many objectives, the multiobjective genetic algorithm and the multiobjective genetics algorithm with reference direction have been improved and combined used. The certain conflicting relations between three primary design objectives have been obtained by analyzing the distribution of nondominated solutions, and the multilayer designs with critical average reflectivities have been found. Basing on the multiobjective genetics algorithm with reference direction, the exact multilayer design has been obtained by guiding the searching in desired region of solution space. Our method can supply the multilayer designs which are the optimal trade-offs among these design objectives, and it has a great potential in designing optical multilayers with more objectives.