Nanoelectromechanical Sensors based on Suspended 2D Materials

TL;DR

This review discusses the development of nanoelectromechanical sensors using suspended 2D materials, highlighting their unique properties, fabrication methods, and potential applications in various sensing devices.

Contribution

It provides a comprehensive overview of sensing concepts, material properties, fabrication techniques, and compares current state-of-the-art 2D material-based sensors.

Findings

2D materials enable smaller, more sensitive sensors

Suspended 2D membranes are effective in pressure and gas sensing

Challenges include integration and readout methods

Abstract

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.