Piezoelectric SPDT NEMS Switch for Complementary Logic

TL;DR

This paper introduces a novel piezoelectric AlN-based SPDT NEMS switch that enhances the performance of CMOS-like relays by reducing leakage and delay, with detailed design, analysis, and fabrication processes.

Contribution

It presents a new AlN piezoelectric cantilever-based SPDT switch that improves upon previous relay structures in performance and fabrication.

Findings

Optimized switch parameters such as actuation voltage and switching time.

Comparison shows improved performance over previous 'see-saw' relay.

Detailed design and micro-fabrication process provided.

Abstract

Off-state current leakage and switching delay has become the main challenge for continued complementary metal-oxide-semiconductor (CMOS) technology scaling. Previous work proposes a "see-saw" relay structure to mimic the operation of CMOS. This paper presents a novel single-pole double-throw (SPDT) switch structure based on AlN piezoelectric cantilever beam to improve the former "see-saw" relay structure. Geometry parameters are given and key switch parameters such as actuation voltage, switching time and contact force have been calculated and compared with previous "see-saw" relay structure. Analysis and design process is shown and micro-fabrication process is described as well.